ALTAIR
The Brightest Solution To Pyrophorics
System Description
The Altair is a passive gas treatment device designed to effectively treat effluent gases from semiconductor process tools. These costeffective units are employed in a wide variety of applications including, but not limited to, those listed below.
Advantages
- No flammable fuel gases required.
- Small, compact design - 30" long x 23" tall x 14" wide.
- Lowest cost of ownership of any gas treatment device.
- Utilizes existing scrubber or ventilation system by drawing in room air for operation.
- Only 100-220 CFM (1" W.C. static pressure) of scrubber or ventilation air required.
- PMs take only 15-45 minutes to perform.
- Typical PMs are performed on 1-3 month intervals.
- No expensive utilities required for operation.
- Reliable, safe and efficient operation.
