Dry Solution to Toxic Abatement

System Description

Cyrus is a dry adsorption system that removes various gas phase contaminants from semiconductor effluent gas streams. Primarily used in point-of-use (POU) applications, Cyrus utilizes proprietary, passive, adsorptive materials that remove and concentrate dangerous and highly toxic compounds such as Arsine (AsH3), Phosphine (PH3), and Germane (GeH4). This system can also remove organic compounds and high molecular weight VOC’s. Different media mixtures can be provided for adsorbing acid gases and ammonia as well.

Cyrus is available in multiple configurations and sizes. Dual alternating chambers and multistages are available. Sensors monitor pressure drop, temperature, and canister capacity for breakthrough.

Cyrus can be custom-engineered to handle specific processes. In addition, Cyrus can be utilized in conjunction with other Enviro-Matrix systems as a pre- or post-treatment stage


  • Abatement to below TLV
  • Very high capacities
  • Compact and reliable
  • Proven performance
  • Concentrates toxics
  • Small footprint
  • Single and dual configurations
  • Safe passive design
  • Automatic inert purge
  • Bed saturation detectors available
  • Dual canister designs available


  • Outlet Connection

    1.5” KF 40

  • Inlet Connection

    1.5” KF 40

  • Max. Inlet Gas Flow

    up to 300 slm

  • Typical Gas Flow Rate

    100-150 slm N2

  • Maximum Contaminant Flow

    4-5% by volume in mixture

  • Canister Dimensions

    12” O.D. x 70” Tall

  • Enclosure (Single)

    32” L x 32” W x 92” H

  • Cabinet Exhaust Requirement

    300 cfm

31025 충남 천안시 서북구 입장면 강당길 26-2
17551경기도 안성시 공도읍 기업단지로 102

Tel 82-41-583-9806 Fax 82-41-583-2969

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